![Sensors | Free Full-Text | Design and Modeling of a MEMS Dual-Backplate Capacitive Microphone with Spring-Supported Diaphragm for Mobile Device Applications Sensors | Free Full-Text | Design and Modeling of a MEMS Dual-Backplate Capacitive Microphone with Spring-Supported Diaphragm for Mobile Device Applications](https://www.mdpi.com/sensors/sensors-18-03545/article_deploy/html/images/sensors-18-03545-g001.png)
Sensors | Free Full-Text | Design and Modeling of a MEMS Dual-Backplate Capacitive Microphone with Spring-Supported Diaphragm for Mobile Device Applications
![Figure 1 from High sensitivity and high S/N microphone achieved by PZT film with central-circle electrode design | Semantic Scholar Figure 1 from High sensitivity and high S/N microphone achieved by PZT film with central-circle electrode design | Semantic Scholar](https://d3i71xaburhd42.cloudfront.net/bc96283b393ede348e3dee233e04732284411b94/1-Figure1-1.png)
Figure 1 from High sensitivity and high S/N microphone achieved by PZT film with central-circle electrode design | Semantic Scholar
![Illustration of the working principle of the MEMS microphone, b cross... | Download Scientific Diagram Illustration of the working principle of the MEMS microphone, b cross... | Download Scientific Diagram](https://www.researchgate.net/publication/279966845/figure/fig5/AS:272635560984626@1442012791746/Illustration-of-the-working-principle-of-the-MEMS-microphone-b-cross-sectional-diagram.png)